In this laboratory, all necessary cleaning and preparation activities of the in-house developed semiconductor circuits are performed.

Equipment:

• Wet chemical workbenches with exhaust air of ISO class 5.
• Drying oven with vacuum and inert gas connection
• Low temperature freezer for long-term storage of adhesives
• Wafer saw for glass and silicon substrates
• Chip storage cabinets with inert gas connection
• various microscopes for surface inspection and alignment of semiconductor structures