In this laboratory, all necessary cleaning and preparation activities of the in-house developed semiconductor circuits are performed.
- Wet chemical workbenches with exhaust air of ISO class 5.
- Drying oven with vacuum and inert gas connection
- Low temperature freezer for long-term storage of adhesives
- Wafer saw for glass and silicon substrates
- Chip storage cabinets with inert gas connection
- various microscopes for surface inspection and alignment of semiconductor structures